USPTO trademark record

SUBMICRON

Dead mark · Owner SUBMICRON SYSTEMS, INC. · Classes 9

Mark details

Owner: SUBMICRON SYSTEMS, INC.
Serial number: 73817473
Registration number: 1598327
Status: CANCELLED - SECTION 8 (dead)
Classes: 9 (Software / electronics / downloadable media)
Filed: 1989-08-07
Registered: 1990-05-29
Goods / services: WASH STATION FOR PROCESSING SEMICONDUTOR WAFERS COMPRISING A ROBOTIC ARM FOR HOLDING SUCH WAFERS AND ASSOCIATED CHEMICAL TANKS

Register data as of 2026-11-09. Records can trail live filings — check the official USPTO search for the latest status before filing.

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